“Carbon nanotubes (CNTs) are the only material capable of meeting the so-called dream conditions—withstanding 800°C, achieving over 94% transmittance, and keeping variation within 0.4%,” said Kim Se-hoon, CEO of aweXome Ray.
As semiconductor circuits grow denser and EUV lithography tools exceed 600W of output, the durability of pellicles—thin membranes that shield photomasks from contaminants—has become increasingly critical. In sub-2nm nodes, where yield depends on the ability to carve finer, more precise patterns, pellicles are no longer optional but essential. Addressing this challenge, a Korean startup is stepping forward with next-generation materials.
In an interview with the Seoul Economic Daily on February 2 at D.CAMP in Seoul, Kim said, “Last month we successfully produced a full-size membrane (11 cm by 14 cm) made of CNT material, large enough to cover an entire photomask. Globally, aside from Finland’s Canatu, no other company has managed to turn CNTs into films of this scale through post-processing.”
